Fabrication of a two-dimensional diffraction grating by a two-axis Lloyd's mirror interferometer

抄録

This paper presents an optical setup to fabricate a large-area two-dimensional diffraction grating by using a two-axis Lloyd's mirror interferometer. In order to fabricate large-area gratings, a large collimating lens, which generates a large diameter collimated beam, is integrated into the optical setup. In this paper, an evaluation of the intensity distribution of the collimated beam and an exposure experiment are carried out. In addition, the fabricated grating is measured by an atomic force microscope to evaluate the effectiveness of the developed setup with the large collimating lens.