Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
Online ISSN : 2424-3086
ISSN-L : 2424-3086
2017.9
セッションID: 123
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Fabrication of Nanoscale Micropins Using Monocrystalline Diamond Turning Tools
Eisuke KOYAKenichi KURIYAMAKai EGASHIRAKeishi YAMAGUCHIMinoru OTA
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The fabrication of nanoscale free-cutting brass micropins was performed using a monocrystalline diamond turning tool and a micro turning machine. The turning of micropins with an aspect ratio of larger than 3 was attempted at different approach angles. At an approach angle of 30°, no nanoscale micropin was turned. However, a micropin 600 nm in diameter and 3 μm in length was fabricated at an approach angle of 0°. At an approach angle of -15°, a 500-nm-diameter and 3-μm-long micropin was successfully turned, which is the smallest-diameter micropin fabricated by turning, to the best of our knowledge.

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© 2017 The Japan Society of Mechanical Engineers
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