Evaluation of relative vertical error motions of a bench center by using an optical micrometer

抄録

This paper presents a method for the measurement of relative vertical error motions with respect to vertical misalignment error of a bench center by using an optical micrometer. A roll is used as a reference object and the optical micrometer are employed as a measurement device. In order to achieve an accurate evaluation, a measurement method is proposed to remove the straightness error and the concentricity error of the roll. Through experiment, the relative vertical parallelism error motion with respect to the misalignment error was evaluated to be 1.44 μm and the vertical straightness error was evaluated to be 14.01 μm.