Fundamental Investigation of Working Fluid Flow Formed by High-speed Wire Running in Multi-wire EDM Slicing

抄録

Multi-wire EDM slicing method, which combines technologies of electrical discharge machining (EDM) and multi-wire saw, is expected as a high-quality and high-efficient slicing for Si and SiC ingot. However, in this method, the phenomena of working fluid flow have not been clarified yet, and the working fluid flow formed by high-speed wire running was investigated with high-speed camera observation and computational fluid dynamics (CFD) analysis. In the multi-wire EDM, the flow velocity in the vicinity of processing wire electrode is equivalent velocity to fluid flow formed by nozzle jet flushing. Therefore, the working fluid flow in multi-wire EDM has the sufficient performance to exclude debris from the narrow gap without nozzle jet flushing.