Abstract
A stacked piezoelectric actuator is used for precision positioning because of high resolution, large generative force and high responsiveness. It is usually used in compressive load because it is weak in tensile load. However, there are no detail reports about influence of load on characteristics such as displacement and permittivity. In the previous work, we obtained results that the behavior of displacement and relative permittivity of stacked piezoelectric actuators for the load did not match under the same measurement condition, and that these behaviors varied by the input voltage amplitude and the offset voltage. In the present paper, we measure the displacement and relative permittivity characteristics of stacked piezoelectric actuators which have different material properties. As a result, behavior of the displacement and relative permittivity for load are different for each stacked piezoelectric actuator.
