抄録
Diamond-like carbon (DLC) films have been the subject of considerable attention because of their exceptional mechanical properties such as low friction coefficient and high wear resistance. Therefore, many mechanical applications of DLC films have already been put to practical use such as mechanical components, automotive parts, hard disk heads, dies, and cutting tools. Here I present the current status and prospects of DLC coating technologies in terms of deposition methods, and mechanical characteristics. Next, tribological property of DLC films prepared on a rubber substrate by RF-plasma CVD and pulse-plasma CVD are discussed using a ball-on-disk test. Observation results of the substrate led us idea that segment structure is formed automatically. Based on these results, a new coating method: "segment-structured DLC coating" is proposed. Segment-structured DLC films are prepared on a steel substrate. Tribological properties are discussed comparing with conventional continuous DLC films.