抄録
Silicon plate of thickness 100μm has flexible bending, and thus, new added value is provided. In this study, we investigated a new horizontal pulling method using surface tension because the production less than lOOμm were difficult by conventional methods. We draw solidified thin plate from a slit of the crucible. This experiment is a model experiment using the metal with low melting temperature. As a result, we succeeded in obtaining minimum thickness of 100mm, but the process was not stable. Thus, we studied solid-liquid interface position and temperature control mainly to realize a stable process. Solid-liquid interface position depended on the metal temperature, room temperature, and drawing speed. In addition, the experiment where we supplied raw materials into the crucible was successful in obtaining long plate with constant width.
