抄録
In MEMS technology, it is important to know the characteristics of thin film alloys. Studies have been made on the high speed and high efficiency high-throughput evaluation in a wide variety of samples. Nevertheless, high-throughput evaluation of fatigue strength which is important in MEMS design has not been studied enough. In this research, we propose a high-throughput fatigue test for thin film alloys using micro-actuator, including the fabrication of both micro-actuator and specimen. This method is succeeded applying on Ti specimen with higher than 5 kHz frequency of loading. Finally, the S-N curve of Ti thin film was obtained.
