複素屈折率を指標とする真実接触測定の可能性検討

抄録

This report deals with a feasibility study on applying ellipsometry technique to the real contact measurement. The rotating-analyzer ellipsometer was adopted for the apparatus and the contact plane images were captured by camera to obtain distribution of the measured values. The contact situation was investigated on the case of a steel ball pressed against a glass plane under two atmospheres: air and water. First, the complex refractive index was measured by applying the reflection model at single interface. The measured values showed generally good agreement with the physical properties, but showed large discontinuities at the contact/non-contact boundary. Next, the gap distance between the steel ball and the glass plane was measured by applying the reflection model with multiple interfaces which considered optical interference by the light reflected from the gap. The measured values showed good agreement with Hertz theory, which implied the validity of applying the reflecting model with multiple interfaces to the real contact measurement.