抄録
Michelson laser interferometry and an ultra-high speed motion camera were applied to measure the cantilever displacement. Silicon plate having very smooth surface was attatched to cantilever at the backside ot the tip and the interference fringe patterns was extremely improved to observe the three-dimensional displacement of the cantilever. Simultaneous measurement of the travel of probe tip and the inclination of cantilever showed that the transient response during the separation between the tip and the sample surface.
