抄録
For the purpose of quantitatively evaluating residual stress through the thickness in ceramics/metals diffusion welds, a series of study have been carried out. In this paper, residual stress through the thickness generated by Cu and Si_3N_4 diffusion bonding was measured by inherent strain method. By the way, considering temperature dependency of materials constants, the experiment was simulated by thermal elastic-plastic FEM analysis. As the results, it was known that the magnitude and the distribution of residual stress through the thickness generated by diffusion bonding of ceramics and metals could be predicted.
