抄録
This paper presents an improved touch probe system for higher sensitivity. In this system, three fiber optic displacement sensors measure displacement and direction of a tip ball of the probe. Because the measuring resolution of the displacement was less than 12nm in experiments, a probe pre-travel was determined to 50nm. The variation of the pre-travel was less than 25nm in whole directions. The measuring force was approximately 0.6mN in horizontal directions, and was 9.4mN in vertical direction.
