抄録
This paper proposes a design method of a three dimensional active isolation system with a low stiffness isolation table assumed as large-size and lightweight isolation system. In large-size and lightweight isolation table, multi vibration modes appear on an isolation table in lower frequency region. Taking account of this, we construct a scale model of the lightweight isolation system and make the 5-DOF lumped mass model using a reduced order physical modeling method which is effective for controlling multi modes vibration in the vertical direction. In the horizontal direction, a rigid body model is created. In controller design, two-degree-of-freedom controller combining feedback controller with feedforward one is designed. Usefulness of proposed modeling method and controller is confirmed through numerical simulations and experimental results.
