抄録
This paper proposes a novel micro injector using surface acoustic wave for a wide range injection from μ l/sec level to fl/sec level. It describes the fabrication and evaluation of the novel micro-injector. It was confirmed that Dyed water was successfully injected into the air with the help of Surface Acoustic Wave (SAW), which was generated by micro-machined Aluminum Inter-digital Transducer (IDT) on the AT-cut quartz substrate. In our knowledge, this kind of micro-injector using SAW is considered as the first device for fluidic injection.
