2712 超音波モータを応用したマイクロ移動機構部品の精密加工と精密組立(S33-1 材料の超精密加工とマイクロ/ナノ加工の動向(1),S33 材料の超精密加工とマイクロ/ナノ加工の動向)

抄録

Ultrasonic motors are usually operated by the mechanism with the expanding and contract of piezo-electric elements. Ultrasonic motors are characterized by a high torque at low-speed without the decelerator. There are few influence of the magnetic field on the precious motion of the motor. This motor could be miniaturized owning to the simple structure. From these characteristics the ultrasonic motors are expected to be applied to driving source etc. of the micro-machine driven in a small area. In this research, we processed the micro-moving drive with the ultrasonic liner motor. The machining accuracy of height relation of each leg was suppressed with 4μm by using the lapping process. The vibration amplitude of each leg was measured by the laser Doppler vibrograph. The driving experiment equipped with the completed micro-moving device was performed and the best driving condition was examined by the micro-moving device.