年次大会講演資料集
Online ISSN : 2433-1333
会議情報
W03-(2) シリコン結晶製造プロセスのナノ、ミクロ、マクロスケール数値計算
柿本 浩一村川 淳石井 秀夫劉 立軍篠崎 高茂
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会議録・要旨集 フリー

p. 259-260

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抄録
Thermal conductivity of solid silicon as a function of mole fraction of isotope was investigated by molecular dynamics simulation. An empirical potential of Stillinger-Weber potential was used to speculate thermal conductivity of isotope silicon. The equilibrium molecular dynamics based on Green-Kubo's formula was used to investigate thermal conductivity of silicon as a function of mole fraction of isotope. The calculation clarified that thermal conductivity of mixed isotope silicon has a half value of that of pure isotope silicon. The calculation also investigated that pure isotope with light mass has a large thermal conductivity.
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© 2003 一般社団法人日本機械学会
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