抄録
We demonstrate a novel rotary vertical micromirror for fiber-optic switching. A very simple fabrication process which uses SOI wafer and DRIE technology has been employed to micromachine this electrostatically actuated mirror. Based on this one-mask process, 2N-switch-architecture cross-connects with all the components, including optic fiber couplers, electrostatic comb drives and reflective vertical mirrors, has been integrally fabricated on a monolithic silicon substrate.
