Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE
Online ISSN : 2424-3132
2003
会議情報
OD-04 CHARACTERISTICS AND CONTROL OF MEMS MIRRORS FOR OPTICAL CROSS-CONNECT SWITCH
Joji YamaguchiNobuyuki TakeuchiAkira ShimizuTsuyoshi YamamotoEiji HigurashiRenshi SawadaYuji Uenishi
著者情報
会議録・要旨集 フリー

p. 261-262

詳細
抄録
A MEMS mirror that we are developing for a three-dimensional MEMS optical switch module features a terraced electrode structure that enables low driving voltage. The mirror can tilt more than 4 degrees at less than 80-V driving voltage. A control method for the MEMS mirror achieves a short switching time. We demonstrate 3 msec switching time.
著者関連情報
© 2003 The Japan Society of Mechanical Engineers
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