抄録
In this paper, the active non-contact ultrasonic motor with micro positioning ability of a rotor is proposed and the performances are tested. The stator has simple cylindrical form for low manufacturing cost. The resonant frequency of 8th mode deflective vibration is specified to be 22.2kHz. It was experimentally confirmed that the rotor rotated with levitation from stator. In addition, the piezoelectric actuators around the stator exciting the deflective vibration could make micro positioning of stator.
