抄録
This report describes a method to control position by open-loop drive of a piezoelectric actuator. In previous reports[1]-[2], we have shown that it is possible to reduce influence of the nonlinearity of piezoelectric actuators by a special driving method in which the actuator is driven only in a direction of expansion and driven with overshoot. In the present report, it is investigated that a driving method to realize nano-meter order accuracy positioning.
