抄録
High-bandwidth and high-accuracy servo actuation of the recording head is necessary for the future high areal density of hard disk drives (HDD). A 3-D electrostatic microactuator for dual-stage servo system of HDD has been developed in this paper. Parallel-upstanding comb drives are utilized, and interlapped-L flexures are introduced for the microactuator, which make the actuator a thick 3-D structure with a high aspect ratio. The 3-D microactuator is fabricated in a bulk silicon wafer bonded to a Pyrex glass substrate by using MEMS technologies, and it is assembled between the slider and suspension's gimbal. Simulated model has predicted the 0.58-μm displacement and 2.1-kHz resonant frequency of the microactuator with a low driving voltage of 30V.
