Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE
Online ISSN : 2424-3132
2003
会議情報
MN-10 NANO-SCALE PROCESSING AND VISCOELASTICITY EVALUATION OF MODIFIED POLYMER MATERIALS USING ATOMIC FORCE MICROSCOPE
Mei WANGShojiro MIYAKEShuichi WATANABE
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会議録・要旨集 フリー

p. 73-74

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In this article, to realize super-high storage density and high precision memory using polycarbonate and polyolefin as a media, nanometer-scale processing properties of polycarbonate (PC), polyolefin (PO), fluorocarbon plasma-treated and DLC films coated polycarbonate and polyolefin were investigated with the tip sliding of atomic force microscope (AFM). The mechanical and viscoelastic properties of modified PC and PO are improved obviously comparing with those of untreated PC and PO. Microwear depths of 3 nm DLC PC and were decreased from 24.1 nm to 0.48 and that of 3 nm DLC PO was decreased from 29.6 nm to 1.07nm. Stiffness of modified PC and PO show a tendency toward low. It is considered that molecular interaction between a tip and processed surface became weak due to C-F bonding and DLC structure.
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© 2003 The Japan Society of Mechanical Engineers
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