抄録
A SiN_x-based cantilever type microactuator with length of the order of 1mm was fabricated and evaluated. Multilayered thin films of NdFeB and Ta, with total thicknesses of 3μm, were deposited on the front-end plate of a 3μm-thick SiN_x cantilever by magnetron sputtering. Pt strain gauges were fabricated on the cantilever, acting as a build-in displacement sensor. Positioning control was realized by using a PID controller, with the output from the strain gauge sensor as the feedback signal. The positioning resolution and bandwidth of the actuator were 2μm and 240 Hz, respectively.
