抄録
This paper describes a novel tri-switches tactile structure assembling process and its measurement characteristics on micro-CMM. After fabrication micro ball-ended stylus tips by micro-EDM and OPED process, the spherical stylus was assembled onto the CMM's probing head manually. The tri-switches sensing structure was utilized to trigger the electro signal while the stylus tip makes contact with a micro-component. In the experiment on the same point detected repeatedly, results show that the uncertainty could be as small as 0.11μm and 0.29μm in the vertical direction and horizontal respectively. This tri-switches tactile structure is capable of measuring the inner features of micro-hole and the geometry profile of micro components. It's possible to apply this novel low-cost tri-switches triggering system to develop on micro-CMM and measure micro-components' geometric profiles.
