単焦点多点分光顕微ラマン装置によるラマンスペクトル測定

抄録

Raman microspectroscopy is powerful tool to analyze components and crystal structure of materials, and stress/strains in electronic devices and Nano/Micro electronic mechanical systems. However, the capability of conventional Raman microscopes to obtain two dimensional Raman images is limited. In order to obtain the 2D-images by conventional Raman microscopes, the laser spot is scanned on the surface of materials by moving the stage. Therefore, the time required for the 2D images obtained by typical point measurements is too long. In this study, we developed single focus-multi point micro-Raman spectrometer for two-dimensional Raman imaging with Raman spectrum of each point in the analyzed region. The characteristics of this instrument are that micro-lens array divides Raman scattered region into some square regions and that Raman scattered lights of each region are individually collected by using dimension transformation bundle fiber. Single focus-multi point micro-Raman spectrometer is applied to 2D-imagings of carbon and epoxy resin in carbon fiber reinforced plastics (FRP).