自己変形発現により作製した金属被覆微小コイルの電磁気特性に関する研究

抄録

It is important to evaluate the magnetic property of magnetic storage devices which has very small size due to minitualization and high density. In this study, we propose a new scanning magnetic sensor combined by Atomic Force Microscopy (AFM) system and conductive nanocoil probe. Conductive nanocoil probe having an AFM tip combined with conductive micro/nano coil is possible to be used for magnetic evaluation according to the principle of electromagnetic induction. Furthermore, the conductive nanocoil probe has a distinctive feature which unites both observation and control of magnetic state at very small size, because the magnetic control is possible by the impressing current to the coil. To fabricate nanocoil on the AFM tip, the method of fabricating micro/nano coils which is based on a mechanical process, i.e., a straight nanowire is bent by depositing a thin film with a circumferentially nonuniform thickness on the nanowire, was used. The bending of nanowire is due to the misfit strain of the coated film. In order to enhance the bending, the heat treatment was conducted to induce a creep flow in the nanocoil, and to release the constraint of the nanowire on elastic bending due to film strain. From the result, the fabrication of nanocoil on the AFM tip with a high conductivity on the scale of 10⁶ Ω・m was achieved successfully.