抄録
This report describes the development of the slurry-ice jet polishing (SIJP) device for the polishing of the micro-aspherical optics, which is capable of intermittent blasting of slurry-ice. The SIJP process is similar to an ice jet machining (IJM). SIJP uses fine ice powders of colloidal silica, which are produced under the low temperature condition of -150℃ or below. As the ice jet stream from the nozzle is focused onto the workpiece, small part of micro optics can be polished. The blasted slurry-ice is melted and has no influence upon the environment of production processes. We investigated the blasting characteristics and the possibility of the SIJP process. It was clear that the SIJP device can blast slurry-ice and that the BK7 glass material can be polished.
