抄録
In the areal surface profile measurement, the sampling distance is very important when using a point-type displacement sensor. Firstly, it is essential to reveal the lateral resolution of the sensor so that the adequate sampling conditions for obtaining representative discrete point data could be determined. Then, by knowing the wavelength band for conventional straightness and flatness assessments, we introduced a signal conditioning process in the long-wave side of the processed data. As to the final sampling distance, we applied auto-correlation techniques to the wavelength analysis of surface-dependent profile data.
