D35 五節閉リンクマイクロマシンによるダイヤモンド砥石を用いた低圧研磨加工(OS-7 研削・砥粒加工(2))

抄録

Recently, the idea of sustainable development is spreading rapidly from aggravation of the earth environment. Then, we can omit the useless when producing by doing the machine tool in the down-sizing under the idea of small parts processing using small machine, and responsible concern for the environment its requested. Additionally, the hard brittle materials used for optical components and electronic parts are produced by loose abrasive. However, loose abrasives process also creates a great burden on the environment. Thus it is necessary to replace this process with fixed abrasives with the idea of improving its shaping capability and alleviating environment problems. We draw attention to a five link micro machine. In the present report, it try to do polishing which trocoid movement in the plane of X-Y applying the kinetic characteristic of a five link micromachining for a hard brittle material, and to obtain the surface design equal with the separation rid processing because of the fixed grid processing.