抄録
Glass materials are widely used in many products such as optical components and semiconductor devices. In these products, precision joining technologies of glass are required to manufacture small and complicated shapes. The laser welding method can joint glasses without an intermediate layer. However, the absorption of laser energy started by nonlinear phenomenon at a focusing point with an ultra-short pulsed laser, and the change of temperature is influenced by the focusing condition. Therefore in this study, effects of focusing condition of laser beam on micro-welding characteristics of glass were experimentally investigated. The usage of object lens with the spherical aberration correction could create a large molten area even at the same pulse energy. It was clarified that an optical system with the spherical aberration correction led to stabilizing the shape of molten area, which resulted in higher breaking load of weld joint at the same pulse energy.
