表面プラズモン共鳴を用いたマイクロ光造形のインプロセス計測

抄録

A surface plasmon resonance measurement has been applied to meet the strong demand for high resolution in-process measurement on Micro-stereolithography. This multi-layer substrate composed by a PLZT layer embedded between two metal thin films, theoretically, can effectively adjust sensitivity depth of phase-detection based surface plasmon resonance by controlling the applied electric voltage on PLZT. In addition PLZT based substrate has been theoretically evaluated. It has been confirmed that a high-resolution detection at arbitrarily refractive index range can be achieved by not only dynamical adjusting incident angle but also a high controlling the applied voltage on PLZT.