抄録
Distance and shape measurement are very important in manufacturing especially from the point of view of product quality and safety. In particular, laser tracker (LT) has been widely used for measuring the shape of large products such as airplane wings and boat hulls. Laser interferometers are used to measure distance in the LT so far, but it is impossible to measure absolute distance when the laser is obstructed during measurement. Therefore, in this paper, we propose a new LT having an accuracy of 1μm/m using a tandem low coherence interferometer capable of absolute distance measurement. The position or length is determined by measuring the distance between target and reference ball lenses. As a verification of the proposed measurement principle, distance measurement between two ball lenses was performed.
