抄録
The purpose of this research is to apply high efficiency microfabrication with low fluence by near infrared femtosecond laser by applying carbon film to synthetic quartz. In order to examine the effectiveness of the proposed method, a single pulse was irradiated on synthetic quartz coated with C film and synthetic quartz not coated. By applying the C film, the damage threshold of synthetic quartz decreased by 64%. In order to investigate the excitation effect in the proposed method, double pulse processing was performed on synthetic quartz coated with carbon film and synthetic quartz not coated. In double pulse processing, one laser pulse is used for the material of excitation and another pulse is used for processing. The damage threshold increased by laser pulse irradiation as pulse interval increased. As a result of this, one can see that excitation effect that converges over time has occurred. The convergence of the excitation effect of synthetic quartz coated with C film was different from that of synthetic quartz not coated. As a result of this, one can see that the excitation effect of quartz coated with C film is generated by ablation of the C film.
