高集積化ナノ粒子チップを用いた一次粒子の粒径分布計測

―未知濃度の粒子溶液のモル濃度の計測―

抄録

We suggest a novel particle sizing method using “nanoparticle chip” to evaluate the primary particle which is dispersed in a liquid. It is aimed that the measurement of the solution concentration for a colloidal solution containing the primary and secondary particle such as CMP slurry. In this report, it is discussed that the method to evaluate the molar concentration of the sample base on the number of the particle in the sampling solution volume when measuring the geometric diameter of the primary particle using “nanoparticle chip”.