抄録
We found that single crystal silicon (SCS) cantilever beam of 2 microns thick, 100 microns long, and 20 microns wide, showed a permanent deformation in a temperature range of 350-500℃. This is against the common understandings on the brittle-to-ductile transition temperature of 600℃ for SCS. The specimen was made from SOI top layer. It was first elastically buckled by axial compressive force bearing a maximum curvature of 30000 (1/m). Then the beam was kept at a constant temperature for 1 hour in air. After cooling down to room temperature and removing the force, the permanent deformation of the beam was examined by measuring freestanding beam profile.
