抄録
This paper reports the development of micro-solid oxide fuel cells (micro-SOFC) with micro-heater fabricated by silicon MEMS technology. As a new battery, micro-SOFC which has high power density and high energy density attracts much attention. We study micro-SOFC's package configuration with thermal insulation. In the package, internal micro-heater is installed for self-star-up, and thermal insulation is achieved by vacuum zone. In this study, we practiced power generation test heated by micro heater without thermal insulation layer and obtained open circuit voltage 1.11V and max power density 6.7μW/cm^2 at 400℃. From this result, we succeed at self-start-up of micro-SOFC but cell performance is not so good because of its temperature unevenness. This problem is solved by installed thermal insulation layer.
