抄録
A lead-free piezoelectric AlN based bent cantilever was fabricated with a heavy proof mass at free end to convert ambient vibration energy to electric energy. High fracture toughness stainless steel substrate was employed to enhance output power and reduce resonate frequency of vibration energy harvester. This device was comprised of stainless steel film as a bottom electrode, Al thin film as a top electrode and c-axis oriented AlN film as functional layer in the middle. Furthermore, the devices were utilized to scavenge both vertical direction and longitudinal direction vibration of cantilever surface. And it presents the high output power of 28.11 μW for vertically induced vibration and 51.73 μW for longitudinally induced vibration when vibration acceleration was 1.0 g.
