抄録
Thermal conductivity was measured by a contact temperature and thermal conductance combination method with the scanning thermal microscope (SThM). The multifunctional cantilever probe of SThM has thermal sensors which include Ni contact electrode, thermopile, thermocouple and two heaters. A Pt thin film of 440 nm thick on a cover glass as the measurement sample and a Cu bulk material as the reference sample were used for another electrode of contact thermocouple. The data measured with the force curve mode showed that heat flow from the probe to the sample and contact temperature were simultaneously measured as varying contact radius. As results, it was found that the method could detect different thermal conductivity between two samples. The order of measuring thermal conductivity of two samples was equivalent to that of each bulk value.
