抄録
Near infrared responsive plasmonic devices were fabricated by soft-imprinting technique using HSQ (Hydrogen Silsesquioxane) solution. The devices, consist of periodic gold structures of 500 nm pirtch, were obtained using PDMS mold imprinting followed by oxygen plasma treatment and thermal annealing. Their plasmonic properties strongly depend on the amount of HSQ solution during the soft-impring. In case of 7 ml of the solution, the devices excited surface plasmonic modes at the incidence of 15 degree when laser light of 850 nm wavelength, which consistent with theoretical value of 14 degree. However, the difference between experimental and theoretical angles for plasmon excitation increased with the amount of solution.
