Si基板上Au回折格子への背面照射と電気的検出によるSPR化学量センサの小型化

抄録

This paper is a study on miniaturization of Surface Plasmon Resonance (SPR) chemical sensor. An Au grating is formed on the n-Si wafer to make the sensor detect SPR electrically. We demonstrated a back side illumination method to excite SPR from the n-Si side. The excitation light is diffracted by the grating. SPR can be coupled to an interface of Au/sample and the excitation light is absorbed. The absorbed energy excites free electrons on the Au surface so that the SPR can be detected electrically by a Schottky barrier diode formed on the Au/n-Si interface. We compared the current responses by the backside illumination method with changing the refractive index of sample using air and pure water. Depending on the change of the sample, peaks appeared at different angles in the currents response curve. We verified that the proposing device can behave as a sensor for the sample species on the Au.