蠕動運動型マイクロゲルロボットの作製

抄録

We present a micro-gel robot having soft-rigid hybrid structure. Soft structure work as actuator and rigid structure work as support body. We use SU-8 which is hard photoresist as rigid structure, and bioresist which is thermoresponsive gel as soft structure. The soft structure mixed light absorber and driven by laser irradiation. The micro-gel robot needs to be separated from the glass substrate to drive. The fabrication process of the micro-gel robot has sacrificial layer process. In this paper, we evaluate processing accuracy of SU-8 when SU-8 is patterned on sacrificial layer. In addition, we fabricate and drive the micro-gel robot.