抄録
A new configuration for rotating gyros using magnetic suspension is proposed in this study. Gyro is one of inertial sensor and measuring instrument for angular velocity. In a magnetically suspended gyro (MSG), a disk-type rotor is connected to a synchronous motor through a fluid bearing and the motor is fixed to the frame of the floator. The floator is suspended by magnetic force without any mechanical contact so that high-accuracy measurement is possible. According to this concept, a 6-degree-of-freedom (DOF) active MSG was developed. However, because the MSG used magnetic attraction pulling upward against gravity, it has high power consumption. In addition, the miniaturization of the MSG was difficult because four pairs of electromagnets were arranged on opposite sides of the floator. To solve these problems, a 2-DOF active magnetically suspended micro gyro (MSMG) is designed and fabricated. In this gyro, the 4-DOF motions of the floator are constrained by a cross spring and a gimbal. The two rotational degrees of motion of the floator is controlled by four electromagnets. The gyro with such configuration is suitable for miniaturization and low-cost fabrication. This paper shows basic concepts and measurement principle of the 2-DOF active MSMG.