抄録
The demand for ultra precise positioning of nanometer-order is increasing with the progress of nanotechnology in semiconductor industry. Previously we developed the one axis stage driven by pneumatic bellows for such a demand, and realized ultra precise positioning and long stroke. However, not only a one axis stage, but also a stage with multiple degrees of freedom is often demanded in semiconductor industry. In this paper, we proposed the actuator unit composed a bellows and elastic hinge guide, and show the fine movement stage with 3 degree of freedom applying proposed actuator units. The characteristics of the pneumatic bellows actuator unit are also evaluated and the positioning accuracy of the actuator unit is 50 [nm] or less, which is same level with the accuracy of one axis stage. It is found that the actuator unit can also realizes ultra precise positioning and long stroke though we must improve the control of the stage to eliminate the small vibration in the transient response.
