抄録
For the purpose to develop a vibration-isolation table with flexibility or scalability (which means "with adaptability to desired load-specification"), this study investigates a self-identification method of positions or arrangement and effective pressure areas of pneumatic actuators which support a vibration-isolation table. Proposed identification method is a fundamental technique necessary to construct a scalable vibration-isolation table in which the actuators supporting the table can be added or removed flexibly, easily, and in short time. First, this study constructs a mathematical model for a vibration-isolation table supported with a redundant number of actuators. And a type 1 digital servo controller is applied to control the position and inclination angles of the table. Next, this study shows the identification method of the position of added pneumatic actuator and the effective pressure areas of pneumatic actuators. Finally, this study demonstrates the proposed identification method by numerical simulations using a detailed model of a vibration-isolation table supported with a redundant number of pneumatic actuators. Further, this study shows an application example of the proposed identification method incorporated with force redistribution method to add an actuator into the vibration-isolation table system during continuous operation, and the reliability of proposed method is confirmed by the response of the displacement and pressures of the vibration-isolation table.
