抄録
The mechanical properties of the post-annealed diamond-like carbon (DLC) films were studied using nano-indentation method and ball-on-disk test. DC ion plating deposition technique has been used to deposit DLC on Si(1OO) substrates. The films were also characterized by Raman spectroscopy and thermal desorptioh spectroscopy (TDS). The hardness of the DLC films was found to decrease above 400℃. The results of Raman spectroscopy and TDS showed that at higher annealing temperatures (400℃ <) graphitization occurred for amorphous DLC with hydrogen desorption. It was found that both friction coefficient and wear rate of these films were unaffected by the post-annealing.
