抄録
FEM computer simulation of the process which an indenter penetrates thin film during hardness test using ultramicro hardness tester is carry out to find out the ideal condition and effect of contact condition of interface between film and substrate. The main results are as follows, (l) Accurate ultramicrohardness of thin film is necessary to limit the plastic inside a thin film. (2) Weak contact of interface makes hardness lower. (3) The hardness test using the large-scale model is almost the same in FEM computer simulation.
