424 放射光を用いた高アスペクト加工と異方性エッチングの組み合わせによる3次元マイクロ構造体の作製(OS 材料の超精密加工・マイクロ加工)

抄録

LIGA process becomes attractive for application to the industry thanks to its performance of fabrication with high aspect ratio and mass production. However, LIGA process is generally possible to produce only the 2.5-dimentional microstructures. So ,we proposed producing 3-dimentional microstructures by means of the combination of LIGA process and anisotropic etching which is suitable for mass production.