抄録
This paper reports on investigation study to expand markets for a newly developed aerostatic lead screw. The accuracy of this aerostatic lead screw is "precision class (0.1μm〜1μm)". Its distinguished characteristics are no loss of accuracy with friction wear, easy to use and reasonable price. Expected fields of applications include focus drive of bio-microscope, 3-D measuring machine, IC exposure apparatus, biomedical robot, DVD pick up, inspection machine and others.
