熱工学講演会講演論文集
Online ISSN : 2433-1317
セッションID: TF-1/C118
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C118 分子動力学法による半導体中の欠陥の拡散挙動解析(新技術フォーラム-1 : 熱工学における量子力学)
柿本 浩一野口 真一郎尾添 紘之
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This paper aims to study diffusion mechanism of point defects such as vacancies and interstitials of silicon in silicon-germanium solid solution using molecular dynamics simulation. Moreover, equilibrium volume of the silicon, germanium and these alloys were also estimated by using two different schemes of constant volume. The calculation revealed that diffusion constants of the point defects are almost independent of external pressure. Furthermore, volume of the system changed almost isotropically.
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© 2001 一般社団法人日本機械学会
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