抄録
Melt convection during the crystal growth process seriously affects the crystal quality. Therefore, the control of melt convection becomes important. For this purpose, we considered the utilization of high frequency magnetic field to control the melt natural convection during the CZ Silicon crystal growth process, and numerically investigated the effect. The results reveal that the high frequency magnetic field induces the opposite direction convection compared with the natural convection. If the induction coil is placed at the slightly above the melt free surface and the adequate induction current and frequency is applied on it, the electromagnetically induced convection is formed below the crystal and the flat temperature distribution below the crystal is obtained due to this convction.
